Semiconductor manufacturing relies on ultra-high purity of the gases used throughout the process. This includes the gases used in atomic layer deposition as well as high levels of accuracy for residual gas analysis.

Environics systems with ultra-high purity configurations are manufactured with metal seal MFC’s and orbitally welded joints, Ultra High Purity (UHP) configured systems have minimal dead volume and maintain a low leak rate to prevent atmospheric contamination of gas calibration standards. With a >20 year history of designing and manufacturing highly reliable systems with low upkeep, long lifespan, and high repeatability and accuracy.

Systems are configured for the gases that will be used to guarantee the highest level of accuracy in manufacture and in analysis of trace level gases.

S4000 and S3000 gas mixing systems as well as S4040 gas dilution systems can be designed with UHP configuration.

Have a similar need?  You can contact us at (860) 872-1111 or here for more information.